Is the Ne operation of the helium ion microscope suitable for electron backscatter diffraction sample preparation?

• Annalena Wolff

Beilstein J. Nanotechnol. 2021, 12, 965–983, doi:10.3762/bjnano.12.73

• , then the overall damage to the specimen is reduced. Keywords: electron backscatter diffraction (EBSD); Ga; helium ion microscope (HIM); ion polishing; Ne; Introduction The helium ion microscope (HIM) has sparked interest in many disciplines since its commercial release in the first decade of the 21st

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

• Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

• ; focused helium ion beam-induced deposition; focused helium ion beam milling; helium ion beam lithography; helium ion implantation; Introduction Since the helium ion microscope (HIM) was introduced 15 years ago [1][2][3], over one hundred HIMs have been installed worldwide and over one thousand research

Scanning transmission helium ion microscopy on carbon nanomembranes

• Daniel Emmrich,
• Annalena Wolff,
• Nikolaus Meyerbröker,
• Jörg K. N. Lindner,
• André Beyer and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 222–231, doi:10.3762/bjnano.12.18

• energy-filtered transmission electron microscopy measurements. Keywords: carbon nanomembranes; dark field; helium ion microscopy (HIM); scanning transmission ion microscopy (STIM); SRIM simulations; Introduction Throughout the past decade, the helium ion microscope (HIM) has emerged as a versatile

• is evaluated and compared to Monte Carlo simulations. A comparison with established thickness measurements confirms the STIM results. Experimental A dark-field scanning transmission ion microscopy (STIM) holder was designed for a Zeiss Orion Plus helium ion microscope (HIM). All HIM and STIM

Bio-imaging with the helium-ion microscope: A review

• Matthias Schmidt,
• James M. Byrne and
• Ilari J. Maasilta

Beilstein J. Nanotechnol. 2021, 12, 1–23, doi:10.3762/bjnano.12.1

• ; ionofluorescense; Review Introduction Since its commercialisation in 2006 [1][2][3][4][5], the helium-ion microscope (HIM) has become a well-established tool for nanoscale imaging and nanoscale fabrication in physics and materials science. It is attractive for those applications as it combines high-resolution

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

• Eduardo Serralta,
• Nico Klingner,
• Olivier De Castro,
• Michael Mousley,
• Santhana Eswara,
• Serge Duarte Pinto,
• Tom Wirtz and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2020, 11, 1854–1864, doi:10.3762/bjnano.11.167

• based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other existing approaches since it combines the information of the scanning beam position on

• microscopy; scanning transmission ion microscopy; Introduction The helium ion microscope (HIM) is an instrument that has already proven its value for high-resolution imaging, compositional analysis, nanofabrication, and materials modification [1][2]. It generates a focused helium (or neon) ion beam with sub

Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

• Nico Klingner,
• Gregor Hlawacek,
• Paul Mazarov,
• Wolfgang Pilz,
• Fabian Meyer and
• Lothar Bischoff

Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156

• resolution. This mass range is of interest due to the interaction of the ions with the near-surface region and, among other use cases, the application of these ions for indirect or resist-aided lithography [3]. The introduction of the helium ion microscope (HIM) [4], working with a gas field ion source (GFIS

Helium ion microscope – secondary ion mass spectrometry for geological materials

• Matthew R. Ball,
• Richard J. M. Taylor,
• Joshua F. Einsle,
• Fouzia Khanom,
• Christelle Guillermier and
• Richard J. Harrison

Beilstein J. Nanotechnol. 2020, 11, 1504–1515, doi:10.3762/bjnano.11.133

• Carl Zeiss SMT Inc., Peabody, MA, USA 10.3762/bjnano.11.133 Abstract The helium ion microscope (HIM) is a focussed ion beam instrument with unprecedented spatial resolution for secondary electron imaging but has traditionally lacked microanalytical capabilities. With the addition of the secondary ion

• well as practicalities for geological sample analyses of Li alongside a discussion of potential geological use cases of the HIM–SIMS instrument. Keywords: geoscience; helium ion microscopy (HIM); lithium; secondary ion mass spectrometry (SIMS); Introduction The helium ion microscope (HIM) is a

An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

• Santiago H. Andany,
• Gregor Hlawacek,
• Stefan Hummel,
• Charlène Brillard,
• Mustafa Kangül and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2020, 11, 1272–1279, doi:10.3762/bjnano.11.111

• -Zentrum Dresden-Rossendorf, Dresden 01328, Germany GETec Microscopy GmbH, Vienna 1220, Austria 10.3762/bjnano.11.111 Abstract In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and

• sparked by SEM/FIB-AFM systems, it is reasonable to assume that the most recent ion beam microscope, the helium ion microscope (HIM), would be a serious contender for the use in combined setups in conjunction with AFM. Introduced by Ward et al. [12], the imaging capability of the HIM surpasses that of the

3D superconducting hollow nanowires with tailored diameters grown by focused He⁺ beam direct writing

• Rosa Córdoba,
• Alfonso Ibarra,
• Dominique Mailly,
• Isabel Guillamón,
• Hermann Suderow and
• José María De Teresa

Beilstein J. Nanotechnol. 2020, 11, 1198–1206, doi:10.3762/bjnano.11.104

• relatively large Ga+ beam diameter (approx. 5 nm) and a high proximity effect generated by Ga+ ion scattering. Regarding a higher spatial resolution, the helium ion microscope (HIM) [27], based on a gas field-ionization source, has emerged as a tool for direct writing of complex 3D nano-objects taking

Stationary beam full-field transmission helium ion microscopy using sub-50 keV He⁺: Projected images and intensity patterns

• Michael Mousley,
• Santhana Eswara,
• Olivier De Castro,
• Olivier Bouton,
• Nico Klingner,
• Christoph T. Koch,
• Gregor Hlawacek and
• Tom Wirtz

Beilstein J. Nanotechnol. 2019, 10, 1648–1657, doi:10.3762/bjnano.10.160

• (THIM) for sub-50 keV helium has been constructed to investigate ion scattering processes and contrast mechanisms, aiding the development of new imaging and analysis modalities. Unlike a commercial helium ion microscope (HIM), the in-house built instrument allows full flexibility in experimental

Size limits of magnetic-domain engineering in continuous in-plane exchange-bias prototype films

• Alexander Gaul,
• Daniel Emmrich,
• Timo Ueltzhöffer,
• Henning Huckfeldt,
• Hatice Doğanay,
• Johanna Hackl,
• Muhammad Imtiaz Khan,
• Daniel M. Gottlob,
• Gregor Hartmann,
• André Beyer,
• Dennis Holzinger,
• Slavomír Nemšák,
• Claus M. Schneider,
• Armin Gölzhäuser,
• Günter Reiss and
• Arno Ehresmann

Beilstein J. Nanotechnol. 2018, 9, 2968–2979, doi:10.3762/bjnano.9.276

• present there is no method available where the lateral resolution is considerably higher as the expected minimum pattern sizes. Here we suggest mask-less patterning by the highly focused beam of a helium ion microscope (HIM), to lower the limits of ion beam induced magnetic pattering in continuous layer

Site-controlled formation of single Si nanocrystals in a buried SiO₂ matrix using ion beam mixing

• Xiaomo Xu,
• Thomas Prüfer,
• Daniel Wolf,
• Hans-Jürgen Engelmann,
• Lothar Bischoff,
• René Hübner,
• Karl-Heinz Heinig,
• Wolfhard Möller,
• Stefan Facsko,
• Johannes von Borany and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2018, 9, 2883–2892, doi:10.3762/bjnano.9.267

• precise irradiation. The recent advance in noble gas ion microscopy, in particular the availability of a highly focused Ne+ beam from a helium ion microscope (HIM), provides ultimate control over the irradiation geometry and fluence [23][24], which leads to a minimal mixed volume and the formation of a

• ) irradiation was performed using a helium ion microscope (HIM) [24][32] (ORION NanoFab, Carl Zeiss). Ne+ ions with an energy of 25 keV were used for ion beam mixing and imaging with either He or Ne was kept to a minimum to avoid additional unintentional damage and mixing. A 10 μm molybdenum aperture was used

Amplified cross-linking efficiency of self-assembled monolayers through targeted dissociative electron attachment for the production of carbon nanomembranes

• Sascha Koch,
• Christopher D. Kaiser,
• Paul Penner,
• Michael Barclay,
• Lena Frommeyer,
• Daniel Emmrich,
• Patrick Stohmann,
• Tarek Abu-Husein,
• Andreas Terfort,
• D. Howard Fairbrother,
• Oddur Ingólfsson and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2017, 8, 2562–2571, doi:10.3762/bjnano.8.256

• )), implying that 2-I-BPT cross-links the fastest, followed by 2-Br-BPT, 2-Cl-BPT and finally BPT. Helium ion microscope (HIM) image of a transferred carbon nanomembrane (CNM) made using 3 min (1.8 mC/cm2) of electron irradiation (50 eV) on a 2-I-BPT self-assembled monolayer. (a) 2500 × 2500 µm HIM image of

Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy

• Patrick Philipp,
• Lukasz Rzeznik and
• Tom Wirtz

Beilstein J. Nanotechnol. 2016, 7, 1749–1760, doi:10.3762/bjnano.7.168

• lateral resolution for 2D and 3D imaging. By contrast the development of a mass spectrometer as an add-on tool for the helium ion microscope (HIM), which uses finely focussed He+ or Ne+ beams, allows for the analysis of secondary ions and small secondary cluster ions with unprecedented lateral resolution

• depth resolving power for experimental conditions on the helium ion microscope (HIM). As such it contributes to the development of SIMS on the helium ion microscope [23][24][25] in order to extend its application to organic samples. The interest of this work is not limited to polymer samples, as they

• capabilities. Conclusion Ion microscopy on the helium ion microscope (HIM) provides higher lateral resolution than on classical SIMS instruments. At the same time the light rare gas primary ion species lead to higher implantation depth and different sputtering behaviour than primary ion species used in

Experimental and simulation-based investigation of He, Ne and Ar irradiation of polymers for ion microscopy

• Lukasz Rzeznik,
• Yves Fleming,
• Tom Wirtz and
• Patrick Philipp

Beilstein J. Nanotechnol. 2016, 7, 1113–1128, doi:10.3762/bjnano.7.104

• the helium ion microscope (HIM) promises higher lateral resolution than on classical SIMS instruments. However, full advantage of this new technique can only be obtained when the interaction of He+ or Ne+ primary ions with the sample is fully controlled. In this work we investigate how He+ and Ne

• is a SIMS instrument dedicated to high-resolution imaging, a lateral resolution of around 50 nm can be reached. Recently, the development of a SIMS add-on system for the helium ion microscope (HIM) [2] demonstrated SIMS imaging with even higher lateral resolution in the 10 nm range [3]. Initially the

• of secondary ions under helium and neon bombardment for conditions used for SIMS imaging on the helium ion microscope (HIM). Of particular interest is how the sputtering processes differ from irradiation with heavier and chemically inert ions used in SIMS (e.g., gallium and argon). Therefore He+ and

Hydration of magnesia cubes: a helium ion microscopy study

• Ruth Schwaiger,
• Johannes Schneider,
• Gilles R. Bourret and
• Oliver Diwald

Beilstein J. Nanotechnol. 2016, 7, 302–309, doi:10.3762/bjnano.7.28

• images were recorded using a high vacuum Orion Plus helium ion microscope (HIM, Carl Zeiss Microscopy GmbH, Germany). The microscope is equipped with an Everhardt–Thornley (ET) detector to record secondary electron images. The acceleration voltage of the ions and the beam current were 30 kV and approx

Imaging of carbon nanomembranes with helium ion microscopy

• André Beyer,
• Henning Vieker,
• Robin Klett,
• Hanno Meyer zu Theenhausen,
• Polina Angelova and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2015, 6, 1712–1720, doi:10.3762/bjnano.6.175

• can visualize them. However, CNMs are electrically insulating, which makes them sensitive to charging. We demonstrate that the helium ion microscope (HIM) is a good candidate for imaging freestanding CNMs due to its efficient charge compensation tool. Scanning with a beam of helium ions while

Scanning reflection ion microscopy in a helium ion microscope

• Yuri V. Petrov and
• Oleg F. Vyvenko

Beilstein J. Nanotechnol. 2015, 6, 1125–1137, doi:10.3762/bjnano.6.114

• Abstract Reflection ion microscopy (RIM) is a technique that uses a low angle of incidence and scattered ions to form an image of the specimen surface. This paper reports on the development of the instrumentation and the analysis of the capabilities and limitations of the scanning RIM in a helium ion

• microscope (HIM). The reflected ions were detected by their “conversion” to secondary electrons on a platinum surface. An angle of incidence in the range 5–10° was used in the experimental setup. It was shown that the RIM image contrast was determined mostly by surface morphology but not by the atomic

Fabrication of carbon nanomembranes by helium ion beam lithography

• Xianghui Zhang,
• Henning Vieker,
• André Beyer and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2014, 5, 188–194, doi:10.3762/bjnano.5.20

• of these films, too. This is related to changes in the chemical structures of the polymers [16][17]. Recently, the helium ion microscope (HIM) has been employed as an imaging and measurement tool for nanotechnology, for which the sub-nanometer sized ion probe and its resulting high brightness lead to

Nano-structuring, surface and bulk modification with a focused helium ion beam

• Daniel Fox,
• Yanhui Chen,
• Colm C. Faulkner and
• Hongzhou Zhang

Beilstein J. Nanotechnol. 2012, 3, 579–585, doi:10.3762/bjnano.3.67

• crystal structure. The resolution of the FIB is limited by the energy spread of the gallium ions generated from the liquid metal ion source (LMIS). The sputter yield is also too large for acute patterning control over very short lateral distances. The recently developed Carl Zeiss Orion Plus helium ion

• microscope (HIM) is a new type of focused ion beam microscope. The HIM uses helium ions instead of gallium ions. Helium ions have a lower mass and therefore are less destructive than gallium ions. Helium ions are effectively non-contaminating. The source is a gas field ion source which does not suffer the

Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

• Gregor Hlawacek,
• Vasilisa Veligura,
• Stefan Lorbek,
• Tijs F. Mocking,
• Antony George,
• Raoul van Gastel,
• Harold J. W. Zandvliet and
• Bene Poelsema

Beilstein J. Nanotechnol. 2012, 3, 507–512, doi:10.3762/bjnano.3.58

• ion microscopy; ion scattering; thin layers; Introduction The helium ion microscope (HIM) has established itself as a high-performance alternative to the classic scanning electron microscope (SEM). The superior resolution and the outstanding performance on insulating samples are well-known facts [1

Channeling in helium ion microscopy: Mapping of crystal orientation

• Vasilisa Veligura,
• Gregor Hlawacek,
• Raoul van Gastel,
• Harold J. W. Zandvliet and
• Bene Poelsema

Beilstein J. Nanotechnol. 2012, 3, 501–506, doi:10.3762/bjnano.3.57

• images. Secondary electron images can be used to extract crystallographic information from bulk samples as well as from thin surface layers, in a straightforward manner. Keywords: channeling; crystallography; helium ion microscopy; ion scattering; Introduction The superior resolution of the helium ion

• microscope (HIM) and its outstanding performance on insulating samples [1][2] make it an interesting tool for materials research. Whilst images based on secondary electrons (SE) can yield an edge resolution down to 0.29 nm [2], backscattered helium (BSHe) images reveal the elemental composition of the